000 00862nam a22002654a 4500
005 20250613001146.0
008 070121s2006 flum b a001 0 eng
020 _a0824723058 (alk. paper)
_c5330 Bht
040 _aSPU
049 _bSPU-BK
050 0 0 _aTK 7875
_bB36M 2006
100 1 _aBanks, Danny.
_9131510
245 1 0 _aMicroengineering, MEMS, and interfacing :
_ba practical guide /
_cDanny Banks.
260 _aBoca Raton, FL :
_bCRC/Taylor & Francis,
_c2006
300 _a326 p
490 0 _aMechanical engineering ;
_v199.
_9131513
449 0 _a110102
504 _aIncludes index
505 0 _aMicromachining--Microsystems--Interfacing
650 0 _aMICROELECTROMECHANICAL SYSTEMS.
_955191
910 _aอ.เอกชัย
_bบุ๊คเน็ท
_c201006/131106
942 _cGEN
998 _anip 0701
_bvip 0701
999 _c107763