TY  - BOOK
AU  - Sergey Edward Lyshevski
TI  - Nano and microelectromechanical systems : fundamentals of nano and microengineering
SN  - 084939166
AV  - TK 7875 L97N 2001
PY  - 2001///
CY  - Boca Raton
PB  - CRC Press
KW  - MICROELECTROMECHANICAL SYSTEMS
N1  - Includes index
ER  -