TY  - BOOK
AU  - Banks,Danny
TI  - Microengineering, MEMS, and interfacing: a practical guide 
T2  - Mechanical engineering
SN  - 0824723058 (alk. paper)
AV  - TK 7875 B36M 2006
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC/Taylor & Francis
KW  - MICROELECTROMECHANICAL SYSTEMS
N1  - Includes index; Micromachining--Microsystems--Interfacing
ER  -