Nano and microelectromechanical systems : fundamentals of nano and microengineering
Sergey Edward Lyshevski
Nano and microelectromechanical systems : fundamentals of nano and microengineering - Boca Raton: CRC Press, 2001 - 338 p
Includes index
084939166
MICROELECTROMECHANICAL SYSTEMS
TK 7875 / L97N 2001
Nano and microelectromechanical systems : fundamentals of nano and microengineering - Boca Raton: CRC Press, 2001 - 338 p
Includes index
084939166
MICROELECTROMECHANICAL SYSTEMS
TK 7875 / L97N 2001
